000 | 00326pam a2200133a 44500 | ||
---|---|---|---|
082 |
_a621.55 _bL584f |
||
100 | _aLewin, Gerhard S. | ||
245 | 1 | _aFUNDAMENTALS OF VACUUM SCIENCE AND TECHNOLOGY | |
260 |
_aN. Y. _bMcgraw-Hill _c1965 |
||
300 | _a284 | ||
650 | _aVacuum Technology | ||
964 | _gCIRC | ||
997 | _a31518 C | ||
999 |
_c415010 _d415010 |