000 00326pam a2200133a 44500
082 _a621.55
_bL584f
100 _aLewin, Gerhard S.
245 1 _aFUNDAMENTALS OF VACUUM SCIENCE AND TECHNOLOGY
260 _aN. Y.
_bMcgraw-Hill
_c1965
300 _a284
650 _aVacuum Technology
964 _gCIRC
997 _a31518 C
999 _c415010
_d415010