000
00255pam a2200097a 44500
082
_a
BTS
_b
MONO 3925
100
_a
E Tannenbaum
245
1
_a
Detailed analysis of thin phosphorous- diffused layers in p-type silicon
260
_a
_b
_c
997
_a
TR19069 C
999
_c
406486
_d
406486