000
00278pam a2200109a 44500
082
_a
BTS
_b
MONO 4700
100
_a
J W Balde
245
1
_a
Evaluation of tantalum films deposited with an open-ended vacuum system
260
_a
_b
_c
700
_a
J J Dineen
997
_a
TR18708 C
999
_c
406481
_d
406481