000 00278pam a2200109a 44500
082 _aBTS
_bMONO 4700
100 _aJ W Balde
245 1 _aEvaluation of tantalum films deposited with an open-ended vacuum system
260 _a
_b
_c
700 _aJ J Dineen
997 _aTR18708 C
999 _c406481
_d406481