000
00239pam a2200097a 44500
082
_a
NASA
_b
CR-524 -
100
_a
R M Mclouski
245
1
_a
Diffusion of impurities into silicon from gaseous sources
260
_a
_b
_c
997
_a
TR9913 C
999
_c
406253
_d
406253