000 00352pam a2200145a 44500
082 _aBTS
_bMONO 2954
100 _aLogan,R A
245 1 _aEFFECT OF OXYGEN ON ETCH-PIT FORMATION IN SILICON
260 _a
_b
_c1957
300 _a5
500 _aBound With Bts Mono 2951-53,2955-76
700 _aPeters,A J
964 _gCIRC
997 _aTR18796 C
999 _c403485
_d403485