000 00346pam a2200133a 44500
082 _aBTS
_bMONO 2762
100 _aTheuerer,H C
245 1 _aREMOVAL OF BORON FROM SILICON BY HYDROGEN WATER VAPOR TREATMENT
260 _a
_b
_c1956
300 _a4
500 _aBound With Bts Mono 2731-2761,2763-2770
964 _gCIRC
997 _aTR18676 C
999 _c403455
_d403455