000 00354pam a2200133a 44500
082 _aBTS
_bMONO 3379
100 _aGnaedinger,R J
245 1 _aSOME ASPECTS OF VACUUM DEPOSITION OF METALS IN TRANSISTOR FABRICATION
260 _a
_b
_c1959
300 _a7
500 _aBound With Bts Mono 3376-3378,3340-3400
964 _gCIRC
997 _aTR19208 C
999 _c403276
_d403276