000 00297pam a2200133a 44500
082 _aBTS
_bMONO 4717
100 _aSchwartz,N
245 1 _aREACTIVE SPUTTERING
260 _a
_b
_c1964
300 _a10
500 _aBound With Bts Mono 4701-16,4718-25
964 _gCIRC
997 _aTR18866 C
999 _c403202
_d403202