000 00341pam a2200133a 44500
082 _aBTS
_bMONO 3695
100 _aTurner,D R
245 1 _aON THE MECHANISM OF CHEMICALLY ETCHING GERMANIUM AND SILICON
260 _a
_b
_c1960
300 _a7
500 _aBound With Bts Mono 3671-3694,3696-3700
964 _gCIRC
997 _aTR19118 C
999 _c403068
_d403068