000 00328pam a2200133a 44500
082 _aBTS
_bMONO 3675
100 _aAtalla,M M
245 1 _aSEMICONUCOR SURFACES AND FILMS; SI-SIO2 SYSTEM
260 _a
_b
_c1959
300 _a19
500 _aBound With Bts Mono 3671-3674,3676-3700
964 _gCIRC
997 _aTR19098 C
999 _c403048
_d403048