000 00356pam a2200145a 44500
082 _aBTS
_bMONO 3248
100 _aBatdort,R L
245 1 _aDIFFUSION OF IMPURITIES INTO EVEPORATING SILICON
260 _a
_b
_c1959
300 _a6
500 _aBound With Bts Mono 3226-3247,3248-3250
700 _aSmits,F M
964 _gCIRC
997 _aTR18950 C
999 _c402909
_d402909