| 000 | 00359pam a2200145a 44500 | ||
|---|---|---|---|
| 082 |
_aBTS _bMONO 3196 |
||
| 100 | _aFrosch,C J | ||
| 245 | 1 | _aDIFFUSION CONTROL IN SILICON BY CARRIER GAS COMPOSITION | |
| 260 |
_a _b _c1958 |
||
| 300 | _a5 | ||
| 500 | _aBound With Bts Mono 3176-95,3197-3200 | ||
| 700 | _aDerick,L | ||
| 964 | _gCIRC | ||
| 997 | _aTR18372 C | ||
| 999 |
_c402639 _d402639 |
||