000			00337pam a2200145a 44500
082			_aBTS _bMONO 3492
100			_aLogan,R A
245	1		_aDIFFUSION OF OXYGEN IN SILICON
260			_a _b _c1959
300			_a4
500			_aBound With Bts Mono 3476-3491,3493-3500
700			_aPeters,A J
964			_gCIRC
997			_aTR19018 C
999			_c402568 _d402568