| 000 | 00337pam a2200133a 44500 | ||
|---|---|---|---|
| 082 |
_aBTS _bMONO 3876 |
||
| 100 | _aRiney,T D | ||
| 245 | 1 | _aRESIDUAL THERMOELASTIC STRESSES IN BONDED SILICON WARFERS | |
| 260 |
_a _b _c1961 |
||
| 300 | _a7 | ||
| 500 | _aBound With Bts Mono 3851-3875,3877-3880 | ||
| 964 | _gCIRC | ||
| 997 | _aTR18999 C | ||
| 999 |
_c402525 _d402525 |
||