000 00312pam a2200133a 44500
082 _aBTS
_bMONO 2515
100 _aUhlir,A
245 1 _aMICROMACHINING WITH VIRTUAL ELECTRODES
260 _a
_b
_c1955
300 _a4
500 _aBound With Bts Mono 2501-14,2516-20
964 _gCIRC
997 _aTR18545 C
999 _c402460
_d402460