000 | 00312pam a2200133a 44500 | ||
---|---|---|---|
082 |
_aBTS _bMONO 2515 |
||
100 | _aUhlir,A | ||
245 | 1 | _aMICROMACHINING WITH VIRTUAL ELECTRODES | |
260 |
_a _b _c1955 |
||
300 | _a4 | ||
500 | _aBound With Bts Mono 2501-14,2516-20 | ||
964 | _gCIRC | ||
997 | _aTR18545 C | ||
999 |
_c402460 _d402460 |