| 000 | 00363pam a2200145a 44500 | ||
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| 082 |
_aBTS _bMONO 4970 |
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| 100 | _aTung,S K | ||
| 245 | 1 | _aDEPOSITION OF OXIDE ON SILICON BY REACTION OF A METAL HALIDE | |
| 260 |
_a _b _c1965 |
||
| 300 | _a6 | ||
| 500 | _aBound With Bts Mono 4951-69,4971-75 | ||
| 700 | _aCaffrey,R E | ||
| 964 | _gCIRC | ||
| 997 | _aTR18503 C | ||
| 999 |
_c402399 _d402399 |
||