| 000 | 00341pam a2200133a 44500 | ||
|---|---|---|---|
| 082 |
_aBTS _bMONO 3963 |
||
| 100 | _aTheuerer,H C | ||
| 245 | 1 | _aEPITAXIAL SILICON FILMS BY THE HYDROGEN REDUCTION OF SICL4 | |
| 260 |
_a _b _c1961 |
||
| 300 | _a5 | ||
| 500 | _aBound With Bts Mono 3951-3962,3964-3975 | ||
| 964 | _gCIRC | ||
| 997 | _aTR19193 C | ||
| 999 |
_c401442 _d401442 |
||