000			00374pam a2200145a 44500
082			_aNASA _bCR-995
100			_aDoo,V Y
245	1		_aINVESTIGATION OF REFRACTORY DIELECTRICS FOR INTEGRATED CIRCUITS.
260			_a _bNasa, Washington, D.C. _c1968
300			_a73
500			_aBound With Nasa Cr-991-994
700			_aKert,D R
964			_gCIRC
997			_aTR1321 C
999			_c397527 _d397527