| 000 | 00344pam a2200133a 44500 | ||
|---|---|---|---|
| 082 |
_aNASA _bCR-580 |
||
| 100 | _aSkouson,Glenn W | ||
| 245 | 1 | _aISOLATION OF COMPONENTS ON A SILICON WAFER USING SIO 2 | |
| 260 |
_a _bNasa, Washington, D.C. _c |
||
| 300 | _a37 | ||
| 500 | _aBound With Nasa Cr-576-579 | ||
| 964 | _gCIRC | ||
| 997 | _aTR12784 C | ||
| 999 |
_c397469 _d397469 |
||