000			00367pam a2200133a 44500
082			_aNASA _bCR-1567
100			_aSchlegel,E S
245	1		_aSTUDY OF FAILURE MODES OF MULTILEVEL LARGE SCALE INTEGRATED CIRCUITS
260			_a _bNasa, Washington, D.C. _c1970
300			_a93
500			_aBound With Nasa Cr-1566, 68-1570.
964			_gCIRC
997			_aTR11805 C
999			_c396378 _d396378