| 000 | 00456pam a2200157a 44500 | ||
|---|---|---|---|
| 040 | _cIITK | ||
| 041 | _aeng | ||
| 082 |
_a669.0284 _bSy68p |
||
| 111 |
_aSymposium on the deposition of thin films by sputtering _cNewyork _d1967 _n2nd |
||
| 245 | 1 | _aDeposition of thin films by sputtering | |
| 260 |
_aNew York _bRochester _c1967 |
||
| 300 | _a146 | ||
| 650 | _aSputtering (Physics) -- Congresses | ||
| 650 | _aIon Bombardment -- Congresses | ||
| 942 | _cBK | ||
| 999 |
_c387963 _d387963 |
||