000 00316pam a2200133a 44500
082 _a539
_bC76t
100 _a
245 1 _aTRANSACTIONS
_cSPONSORED BY MATERIALS RESEARCH CORPORATION
260 _aN. Y.
_bM. R. C.
_c1968
300 _a117
650 _aSputtering (Physics)
964 _gCIRC
997 _aK8794 C
999 _c386294
_d386294