000 00409pam a2200133a 44500
082 _a621.3817
_bM358m
100 _aMarshall, Samuel Louis
245 1 _aMICROELECTRONIC TECHNOLOGY
_cSELECTED ARTICLES FROM SEMICONDUCTOR PRODUCTS AND SOLID STATE TECHNOLOGY
260 _aCambridge, Mass.
_bBoston Technical Pub.
_c1967
300 _a232
650 _aMicroelectronics
964 _gCIRC
997 _aK4564 s C
999 _c381777
_d381777