000			00471pam a2200157a 44500
082			_a621.3817 _bD896m
100			_aDummer, Geoffrey William A
245	1		_aMICROELECTRONICS FABRICATION EQUIPMENT, 1966-67
260			_aOxford, New York _bPergamon Press _cc1966
300			_a531
650			_aElectronic Industries -- Equipment And Supplied
650			_aMiniature Electronic Equipment
700			_aRobertson, J. Mackenzie
964			_gCIRC
997			_aK9784 s C
999			_c381776 _d381776