| 000 | 00638pam a2200205a 44500 | ||
|---|---|---|---|
| 082 |
_a621.3817 _bB911f |
||
| 100 | _aBurger, Robert M. | ||
| 245 | 1 | _aFUNDAMENTALS OF SILICON INTEGRATED DEVICE TECHNOLOGY | |
| 260 |
_aEnglewood Cliffs, N. J. _bPrentice-Hall _c1967- |
||
| 300 | _av. | ||
| 440 |
_aSolid State Physical Electronics Series _v |
||
| 500 | _aContents : V. 1. Oxidation, Diffusion And Epitaxy | ||
| 500 | _aIncludes Bibliographies | ||
| 500 | _aPrentice-Hall Electrical Engineering Series | ||
| 650 | _aMicroelectronics | ||
| 650 | _aSilicon | ||
| 700 | _aDonovan, R. P. | ||
| 964 | _gCIRC | ||
| 997 | _aK13849 v. 1 s C | ||
| 999 |
_c380046 _d380046 |
||