| 000 | 00446ngm a2200145 454500 | ||
|---|---|---|---|
| 040 | _aIIT, Kanpur | ||
| 082 |
_aA161303 _bGA3.1 |
||
| 100 | _a | ||
| 245 |
_aCharacterization and Metrology for ULSI Technology 2005 [Electronic resource] _bAIP Conference Proceedings 788 |
||
| 260 |
_a _b _c |
||
| 500 | _aComplete Proceedings In Pdf Format | ||
| 700 | _aSeiler, David G. [Ed.] | ||
| 953 | _aCD-ROM accompanied with Book | ||
| 997 | _aER3828 CARS R | ||
| 999 |
_c379301 _d379301 |
||