| 000 | 00498ngm a2200169 454500 | ||
|---|---|---|---|
| 082 |
_aA158049 _bGA2.4 |
||
| 100 | _aChen, Francis F | ||
| 110 | _aChang, Jane P | ||
| 245 | 1 | _aLecture notes on principles of plasma processing | |
| 260 |
_aNew York _bKluwer Academic _c2003 |
||
| 500 | _aWin98 Or Later And Adobe Acrobat Or Adobe Reader Required. | ||
| 500 | _a29 Mb | ||
| 500 | _aInteractive Pdf | ||
| 690 | _a621.044 C421L | ||
| 953 | _aCD-ROM accompanied with Book | ||
| 997 | _aER3533 CARS R | ||
| 999 |
_c379129 _d379129 |
||