000 00560ngm a2200133 454500
082 _aA152493
_bA3.1
100 _a
245 1 _aIntegration and packaging of Mems, Nems And Electronic Systems, Interpack 2005
260 _a
_b
_c
500 _a2005 Summer Heat Transfer Conference (Ht2005) : 2005 Asme/Pacific Rim Technical Conference And Exhibition On Integration And Packaging Of Mems, Nems, And Electronic Systems (Interpack2005), July17-22, 2005, San Francisco, Calfornia Usa
690 _a621381 Am35i
953 _aCD-ROM Only
997 _aER2963 CARS R
999 _c378926
_d378926