000			00747pam a2200205a 44500
008			160408b2015 xxu||||| |||| 00| 0 eng d
020			_a9781119083603
040			_aP K Kelkar Library, IIT Kanpur
082			_a621.381 _bM418
100			_a
245	0		_aMaterials and failures in MEMS and NEMS _cedited by Atul Tiwari and Baldev Raj
260			_aMassachusetts _bScrivener Publishing _c2015
300			_axiv, 406p
440			_aMaterials Degradation And Failure Series / Edited By Atul Tiwari _v
650			_aMicroelectromechanical systems -- Design and construction
650			_aNanoelectrmechanical systems -- Design and construction
700			_aTiwari, Atul [Ed.]
700			_aRaj, Baldev [Ed.]
997			_aA182158 C
999			_c377626 _d377626