000 00521pam a2200181a 44500
008 160408b2014 xxu||||| |||| 00| 0 eng d
020 _a9781455777532
040 _aP K Kelkar Library, IIT Kanpur
082 _a620.50287
_bL465f2
100 _aLeach, Richard
245 0 _aFundamental principles of engineering nanometrology
_cRichard Leach
250 _a2nd
260 _aAmsterdam
_bElsevier
_c2014
300 _axxi, 361p
650 _aNonometrology
650 _aNanotechnology
997 _aA181742 C
999 _c377169
_d377169