000 00501pam a2200157a 44500
008 160408b2015 xxu||||| |||| 00| 0 eng d
020 _a978032332734
040 _aP K Kelkar Library, IIT Kanpur
082 _a620.5
_bB469e
100 _aBhattacharyya, Bijoy
245 0 _aElectrochemical micromachining for nanofabrication, MEMS and nanotechnology
_cBijoy Bhattacharyya
260 _aAmsterdam
_bElsevier
_c2015
300 _axxv, 270p
650 _aNanotechnology
997 _aA181723 C
999 _c377076
_d377076