000			00625pam a2200217a 44500
008			160408b2014 xxu||||| |||| 00| 0 eng d
020			_a9788132219125
040			_cIIT Kanpur
041			_aeng
082			_a620.5 _bM583
245	0		_aMicro and smart devices and systems _cedited by K. J. Vinoy ... [et al.]
260			_aNew York _bSpringer _c2014
300			_axxvi, 508p
440			_aSpringer Tracts In Mechanical Engineering
650			_aMicrotechnology
650			_aNanotechnology
700			_aAnanthasuresh, G.K.[ed.]
700			_aKrupanidhi, S.B [ed.]
700			_a Pratap, R. [ed.]
942			_cBK
999			_c376850 _d376850