| 000 | 00664pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408b2013 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9783527335015 | ||
| 040 | _aP K Kelkar Library, IIT Kanpur | ||
| 082 |
_a621.381 _bR279 |
||
| 100 | _a | ||
| 245 | 0 |
_aReliability of MEMS _btesting of materials and devices _cedited by Osamu Tabata and Toshiyuki Tsuchiya |
|
| 260 |
_aGermany _bWiley-Vch _c2013 |
||
| 300 | _axx, 303p | ||
| 440 |
_aAdvanced Micro And Nanosystems _v |
||
| 650 | _aMicroelectromechanical systems -- Reliability. | ||
| 650 | _aMEMS. | ||
| 700 | _aTabata, Osamu, Ed. | ||
| 700 | _aToshiyuki, Tsuchiya, Ed. | ||
| 997 | _aA180313 C | ||
| 999 |
_c376011 _d376011 |
||