000 00565pam a2200157a 44500
008 160408b2014 xxu||||| |||| 00| 0 eng d
040 _aP K Kelkar Library, IIT Kanpur
082 _a621.381
_bSi34
100 _a
245 0 _aSilicon-on-insulator (SOI) technology
_bmanufacture and applications
_cedited by Oleg Kononchuk and Bich-Yen Nguyen
260 _aAmesterdam
_bElsevier
_c2014
300 _axiii, 474p
440 _aWoodhead Publishing Series In Electronic And Optical Materials
_vNo.58
700 _aKononchuk, Oleg., Ed.
997 _aA180407 C
999 _c375774
_d375774