000			00672pam a2200205a 44500
008			160408b2004 xxu||||| |||| 00| 0 eng d
020			_a9783540204817
040			_aP K Kelkar Library, IIT Kanpur
082			_a621.3 _bP912
100			_a
245	0		_aPredictive simulation of semiconductor processing _bstatus and challenges _cedited by J. Dabrowski and E. R. Weber
260			_aBerlin _bSpringer _c2004
300			_axvii, 490p
440			_aSpringer Series In Materials Science / Edited By R. Hull _v
650			_aTransistor.
650			_aAtomare Bewegung.
650			_aComputersimulation
700			_aDabrowski, J., Ed.
997			_aA179494 s C
999			_c375354 _d375354