| 000 | 00572pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2014 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780815515937 | ||
| 040 | _aP K Kelkar Library, IIT Kanpur | ||
| 082 |
_a621.381 _bSa73s |
||
| 100 | _aSarkar, Jaydeep | ||
| 245 | 0 |
_aSputtering materials for VLSI and thin film devices _cJaydeep Sarkar |
|
| 260 |
_aAmsterdam _bElsevier _c2014 |
||
| 300 | _ax, 603p | ||
| 650 | _aMicroelectronics -- Materials. | ||
| 650 | _aFlat panel displays -- Materials. | ||
| 650 | _aSputtering (Physics) | ||
| 997 | _aA179496 s C | ||
| 999 |
_c375345 _d375345 |
||