000			00726pam a2200205a 44500
008			160408b2005 xxu||||| |||| 00| 0 eng d
020			_a9783540210818
040			_aP K Kelkar Library, IIT Kanpur
082			_a621.3815 _bH537
100			_a
245	0		_aHigh dielectric constant materials _bVLSI MOSFET applications _cedited by H. R. Huff and D. C. Gilmer
260			_aNew York _bSpringer _c2005
300			_axxiv, 710p
440			_aSpringer Series In Advanced Microelectronics / Edited By K. Itoh _v
650			_aDielectrics
650			_aIntegrated circuits -- Very large scale integration -- Materials
650			_aSemiconductors -- Materials
700			_aHuff, H. R., Ed.
997			_aA178743 s C
999			_c374842 _d374842