000			00677pam a2200205a 44500
008			160408b2007 xxu||||| |||| 00| 0 eng d
020			_a9783540326410
040			_aP K Kelkar Library, IIT Kanpur
082			_a620.8315 _bB212p
100			_aBallas, R.G.
245	0		_aPiezoelectric multilayer beam bending actuators _bstatic and dynamic behavior and aspects of sensor integration _cR.G. Ballas
260			_aBerlin _bSpringer _c2007
300			_axiv, 358p
440			_aMicrotechnology And Mems / Edited By H. Fujita _v
650			_aActuators
650			_aPiezoelectric ceramics
650			_aElectronics
650			_aEngineering
997			_aA178488 s C
999			_c374466 _d374466