000 00600pam a2200181a 44500
008 160408b2005 xxu||||| |||| 00| 0 eng d
020 _a3540237828
040 _aP K Kelkar Library, IIT Kanpur
082 _a621.39732
_bH532i
100 _aHierlemann, A.
245 0 _aIntegrated chemical microsensor systems in CMOS technology
_cA. Hierlemann
260 _aNew York
_bSpringer
_c2005
300 _aix, 229p
440 _aMicrotechnology And Mems / Edited By H. Baltes
_v
650 _aMetal oxide semiconductors:Complementary
650 _aChemical detectors.
997 _aA178385 s C
999 _c374438
_d374438