000 | 00563pam a2200193a 44500 | ||
---|---|---|---|
008 | 160408b2013 xxu||||| |||| 00| 0 eng d | ||
020 | _a9781441999849 | ||
040 | _aP K Kelkar Library, IIT Kanpur | ||
082 |
_a621.381 _bAd95 |
||
100 | _a | ||
245 | 0 |
_aAdvanced mechatronics and MEMS devices _cedited by Dan Zhang |
|
260 |
_aNew York _bSpringer+Business Media _c2013 |
||
300 | _axi, 249p | ||
440 |
_aMicrosystems / Edited By Roger T. Howe _v |
||
650 | _a621.381 | ||
651 | 0 | _aAd95 | |
700 | _aZhang, Dan, Ed. | ||
997 | _aA177061 s C | ||
999 |
_c373325 _d373325 |