000 00563pam a2200193a 44500
008 160408b2013 xxu||||| |||| 00| 0 eng d
020 _a9781441999849
040 _aP K Kelkar Library, IIT Kanpur
082 _a621.381
_bAd95
100 _a
245 0 _aAdvanced mechatronics and MEMS devices
_cedited by Dan Zhang
260 _aNew York
_bSpringer+Business Media
_c2013
300 _axi, 249p
440 _aMicrosystems / Edited By Roger T. Howe
_v
650 _a621.381
651 0 _aAd95
700 _aZhang, Dan, Ed.
997 _aA177061 s C
999 _c373325
_d373325