000 00603pam a2200193a 44500
008 160408b2012 xxu||||| |||| 00| 0 eng d
020 _a9781437778731
040 _aP K Kelkar Library, IIT Kanpur
082 _a621.38152
_bH191t3
100 _a
245 0 _aHandbook of thin film deposition
_btechniques, processes and technologies
_cedited by Krishna Seshan
250 _a3rd
260 _aAmsterdam
_bElsevier
_c2012
300 _axviii, 392p
650 _aThin film devices--Design and construction
650 _aThin films
700 _aSeshan, Krishna, Ed.
997 _aA176614 C
999 _c372908
_d372908