000 | 00603pam a2200193a 44500 | ||
---|---|---|---|
008 | 160408b2012 xxu||||| |||| 00| 0 eng d | ||
020 | _a9781437778731 | ||
040 | _aP K Kelkar Library, IIT Kanpur | ||
082 |
_a621.38152 _bH191t3 |
||
100 | _a | ||
245 | 0 |
_aHandbook of thin film deposition _btechniques, processes and technologies _cedited by Krishna Seshan |
|
250 | _a3rd | ||
260 |
_aAmsterdam _bElsevier _c2012 |
||
300 | _axviii, 392p | ||
650 | _aThin film devices--Design and construction | ||
650 | _aThin films | ||
700 | _aSeshan, Krishna, Ed. | ||
997 | _aA176614 C | ||
999 |
_c372908 _d372908 |