| 000 | 00529pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2011 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9783642194887 | ||
| 040 | _aP K Kelkar Library, IIT Kanpur | ||
| 082 |
_a621.381 _bSch64i |
||
| 100 | _aSchomburg, Werner Karl | ||
| 245 | 0 |
_aIntroduction to microsystem design _cWerner Karl Schomburg |
|
| 260 |
_aBerlin _bSpringer-Verlag _c2011 |
||
| 300 | _axxi, 319p | ||
| 440 |
_aRwth Aachen University _v |
||
| 650 | _aMicroeletromechanical systems | ||
| 997 | _aA174257 s C | ||
| 999 |
_c371578 _d371578 |
||