| 000 | 00680pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2010 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9783642144462 | ||
| 040 | _aP K Kelkar Library, IIT Kanpur | ||
| 082 |
_a621.39732 _bR242r |
||
| 100 | _aRebohle, Lars | ||
| 245 | 0 |
_aRare-earth implanted MOS devices for silicon photonics _bmicrostructural, electrical and optoelectronic properties _cLars Rebohle and Wolfgang Skorupa |
|
| 260 |
_aBerlin _bSpringer _c2010 |
||
| 300 | _axviii, 173p | ||
| 440 |
_aSpringer Series In Materials Science / Edited By R. Hull _vV.142 |
||
| 650 | _aMetal oxide semiconductors | ||
| 700 | _aSkorupa, Wolfgang. | ||
| 997 | _aA173899 s C | ||
| 999 |
_c371230 _d371230 |
||