| 000 | 00663pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408b2010 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780387095103 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.381 _bAd17i |
||
| 100 | _aAdams, Thomas M. | ||
| 245 | 1 |
_aIntroductory MEMS _bfabrication and applications _cThomas M. Adams and Richard A. Layton |
|
| 260 |
_aNew York _bSpringer Science+Business Media _c2010 |
||
| 300 | _axv, 444p | ||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aElectronic appratus and appliances | ||
| 650 | _aTransducers | ||
| 650 | _aMEMS | ||
| 700 | _aLayton, Richard A. | ||
| 997 | _aA173656 C | ||
| 999 |
_c370707 _d370707 |
||