| 000 | 00521pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2011 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780815515821 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.38152 _bL978m |
||
| 100 | _aLuttge, Regina | ||
| 245 | 0 |
_aMicrofabrication for industrial applications _cRegina Luttge |
|
| 260 |
_aAmsterdam _bElsevier _c2011 |
||
| 300 | _axvii, 289p | ||
| 440 |
_aMicro And Nano Technologies Series _v |
||
| 650 | _aMicrofabrication. | ||
| 997 | _aA173191 C | ||
| 999 |
_c370357 _d370357 |
||