000 00570pam a2200205a 44500
003 OSt
005 20230828151952.0
008 160408b2011 xxu||||| |||| 00| 0 eng d
020 _a9780470556443
040 _cIITK
041 _aeng
082 _a670
_bM583
245 1 _aMicro-manufacturing
_bdesign and manufacturing of micro-products
_cedited by Muammer Koc and Tugrul Ozel
260 _aNew Jersey
_bJohn Wiley & Sons
_c2011
300 _ax, 388p
650 _aMicrofabrication
700 _aKoc, Maummer [ed.]
700 _aOzel,Tugrull [ed.]
942 _cBK
999 _c370188
_d370188