000 00545pam a2200169a 44500
008 160408b2011 xxu||||| |||| 00| 0 eng d
020 _a9781441960191
040 _aIIT, Kanpur
082 _a621.381
_bY88m
100 _aYounis, Mohammad I.
245 1 _aMEMS linear and nonlinear statics and dynamics
_cMohammad I. Younis
260 _aNew York
_bSpringer
_c2011
300 _axv, 453p
440 _aMicrosystems / Edited By Roger T. Howe
_v
650 _aMicroelectromechanical systems
997 _aA172809 s C
999 _c369980
_d369980