| 000 | 00819pam a2200217a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20240530105726.0 | ||
| 008 | 160408b2012 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780849331800 | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bM266f3 |
||
| 100 | _aMadou, Marc J. | ||
| 245 | 0 |
_aFundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.] _cMarc J. Madou |
|
| 250 | _a3rd ed. | ||
| 260 |
_aBoca Raton _bCRC Press _c2012 |
||
| 300 | _a3v. (various pagings) | ||
| 505 | _aContents: v.1 -- Solid-state physics, fluidics, and analytical techniques in micro and nanotechnology. v.2 -- Manufacturing techniques for microfabrication and nanotechnology. v.3 -- From MEMS to Bio-MEMS and Bio-MEMS. | ||
| 650 | _aMicroelectronics -- Design and construction | ||
| 942 | _cBK | ||
| 999 |
_c369650 _d369650 |
||