| 000 | 00531pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2011 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781848212312 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.38152 _bSi34 |
||
| 100 | _a | ||
| 245 | 1 |
_aSilicon technologies _bion implantation and thermal treatment _cedited by Annie Baudrant |
|
| 260 |
_aNew Jersey _bJohn Wiley & Sons _c2011 |
||
| 300 | _axvii, 337p | ||
| 650 | _aSemiconductor doping | ||
| 700 | _aBaudrant, Annie, Ed. | ||
| 997 | _aA172282 s C | ||
| 999 |
_c369525 _d369525 |
||