000 00669pam a2200181a 44500
008 160408b2011 xxu||||| |||| 00| 0 eng d
020 _a9783642177811
040 _aIIT, Kanpur
082 _a621.3815
_bF114
100 _a
245 0 _aFabrication and characterization in the micro-nano range
_bnew trends for two and three dimensional structures
_cedited by Fernando A. Lasagni and Andres F. Lasagni
260 _aBerlin
_bSpringer
_c2011
300 _ax, 222p
440 _aAdvanced Structured Materials / Edited By Andreas Ochsner
_vV.10
650 _aMicrotechnology
700 _aLasagni, Fernando A., Ed.
997 _aA172164 C
999 _c369454
_d369454